Midas?氣體偵測器傳感器型號：

Gas Name Chemical Formula Range Sensor Part Number

Ammonia NH3 9-100 ppm MIDAS-E-NH3

Arsine AsH3 18-200 ppb MIDAS-E-ASH

Boron Trichloride BCl3 0.72-8 ppm MIDAS-E-HCL

Boron Trifluoride BF3 0.72-8 ppm MIDAS-E-HFX

Boron Trifluoride (Low Level) BF3 0.18-2 ppm MIDAS-E-HFL

Bromine Br2 0.036-0.4 ppm MIDAS-E-BR2

Carbon Dioxide CO2 0.15-2.0% MIDAS-E-CO2

Carbon Monoxide CO 9-100 ppm MIDAS-E-COX

Chlorine Cl2 0.18-2 ppm MIDAS-E-HAL

Chlorine Dioxide ClO2 0.036-0.4 ppm MIDAS-E-BR2

Diborane B2H6 36-400 ppb MIDAS-E-B2H

Dichlorosilane H2Cl2Si 0.72-8 ppm MIDAS-E-HCL

Difluoromethane** CH2F2 16-240 ppm MIDAS-E-XCF

Disilane Si2H6 1.8-20 ppm MIDAS-E-SHX

Fluorine F2 0.36-4 ppm MIDAS-E-HAL

Germane GeH4 70-800 ppb MIDAS-E-ASH

Hexafluorobutadiene** C4F6 3-40 ppm MIDAS-E-CFX

Hydrogen (%LEL) H2 6.5-100% LEL MIDAS-E-LEL*

Hydrogen (ppm) H2 90-1000 ppm MIDAS-E-H2X

Hydrogen Bromide HBr 0.72-8 ppm MIDAS-E-HCL

Hydrogen Chloride HCl 0.72-8 ppm MIDAS-E-HCL

Hydrogen Cyanide HCN 1.8-20 ppm MIDAS-E-HCN

Hydrogen Fluoride HF 1.05-12 ppm MIDAS-E-HFX

Hydrogen Fluoride (Low Level) HFL 0.18-2 ppm MIDAS-E-HFL

Hydrogen Sulfide H2S 3.6-40 ppm MIDAS-E-H2S

Methane (%LEL) CH4 6.5-100% LEL MIDAS-E-LEL*

Methyl Fluoride** CH3F 8-120 ppm MIDAS-E-XHF

Nitric Oxide NO 9-100 ppm MIDAS-E-NOX

Nitrogen Dioxide NO2 1.05-12 ppm MIDAS-E-NO2

Nitrogen Trifluoride** NF3 3.6-40 ppm MIDAS-E-HFX for 00P, XHF for NP1

Octofluorocyclopentene** C5F8 3-40 ppm MIDAS-E-XCF

Oxygen O2 0.2-25% v/v MIDAS-E-O2X

Ozone O3 0.065-0.7 ppm MIDAS-E-O3H

Ozone (Low Level) O3 0.036-0.4 ppm MIDAS-E-O3X

Phosphine PH3 110-1200 ppb MIDAS-E-PH3

Silane SiH4 1.8-20 ppm MIDAS-E-SHX

Silane (Low Level) SiH4 0.18-2 ppm MIDAS-E-SHL

Sulfur Dioxide SO2 0.7-8 ppm MIDAS-E-SO2

Tetra Ethyl Ortho Silicate TEOS 3.6-40 ppm MIDAS-E-TEO

Tungsten Hexafluoride WF6 1.05-12 ppm MIDAS-E-HFX

Tungsten Hexafluoride (Low Level) WF6 0.18-2 ppm MIDAS-E-HFL